Inverse Determination of Coupling of Modes Parameters of Surface Acoustic Wave Resonators

Extraction of coupling of modes (COM) parameters from the manufacturing process of a surface acoustic wave device (SAW) is important in practice. In this study, we employed an inverse algorithm to recover the COM parameters from the measured admittance of a one-port SAW resonator. For completeness, the COM equations, the P-matrix representation and the related COM parameters have been summarized. The admittance of a one-port resonator was derived based on the P-matrix representation. One-port and two-port SAW resonator filters were fabricated and the related responses were measured. The simplex method was then used to determine the COM parameters inversely. The recovered COM parameters of the one-port SAW resonator have been demonstrated to be applicable to simulate not only the frequency response of the one-port SAW resonator but also that of the two-port one. [DOI: 10.1143/JJAP.41.6610]